Semiconductor & UHV Hardware
UHV chamber bodies, CF flanges, gas manifolds, and adjacent titanium hardware for semiconductor process tools.
Why Titanium
Titanium is non-magnetic, corrosion-resistant, and low-outgassing — the combination that lets process-tool hardware sit cleanly inside semiconductor and UHV systems. Grade selection (Grade 2 for chambers, Grade 5 for high-strength components, Grade 23 for low-interstitial work) is part of the quote.
Vacuum Requirements
The drawing needs to call out leak handling, cleanliness class, packaging, and bakeout constraints. Those requirements are written into the finished-part quote when the program needs them.
Parts We Quote
Representative scope for drawing-based RFQs.
Vacuum Chamber Bodies
Titanium chambers for process-tool hardware, machined to drawing.
CF Flanges & Fittings
Knife-edge and matching flanges in grade-appropriate titanium.
Gas Manifolds
Manifold blocks and distribution hardware for vacuum gas delivery.
Susceptors & Internals
Susceptors, lift pins, ion-pump bodies, and adjacent tool internals.
Have a chamber drawing?
Send the chamber drawing. We will quote material, leak handling, cleaning notes, packaging, and finished-part delivery together.
Request a Quote